H2 and NO2 Gas Sensors with ZnO Nanobelt Layer on 36° LiTaO3 and 64° LiNbO3 SAW Transducers
نویسنده
چکیده
Single crystal nanobelts of ZnO were synthesized and deposited onto 36° YX LiTaO3 and 64° YX LiNbO3 Surface Acoustic Wave (SAW) devices for gas sensing applications. Sensor response, defined as the change in resonant frequency, was measured for H2 and NO2 between 20 and 200°C. Measured sensor responses were 3.5 kHz towards 10 ppm NO2 for a 64° LiNbO3 SAW transducer operating at 160°C and 3 kHz towards 1% H2 for a 36° LiTaO3 SAW transducer operating at 185°C temperature.
منابع مشابه
A Layered SAW Gas Sensor Based on a Polyaniline/In2O3 Nanofiber Composite
A polyaniline/In2O3 nanofiber composite based layered surface acoustic wave (SAW) sensor has been developed and investigated towards different gases. Chemical oxidative polymerization of aniline in the presence of finely divided In2O3 was employed to synthesize a polyaniline nanofiber/In2O3 nanoparticle composite. The nanocomposite was deposited onto a layered ZnO/64° YX LiNbO3 SAW transducer. ...
متن کاملGraphene-like Nano-Sheets/36° LiTaO3 Surface Acoustic Wave Hydrogen Gas Sensor
Presented is the material and gas sensing properties of graphene-like nano-sheets deposited on 36° YX lithium tantalate (LiTaO3) surface acoustic wave (SAW) transducers. The graphene-like nano-sheets were characterized via scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The graphenelike nano-sheet/SAW sensors were exposed to differen...
متن کاملA ZnO Nanorod Based Layered ZnO/64° YX LiNbO3 SAW Hydrogen Gas Sensor
A zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) sensor has been developed and investigated towards hydrogen (H2) gas. The ZnO nanorods were deposited onto a layered ZnO/64° YX LiNbO3 substrate using a liquid solution method. Micro-characterization results revealed that the diameters of ZnO nanorods are around 100 and 40 nm on LiNbO3 and Au (metallization for electrodes), respective...
متن کاملCharacterization of ZnO Nanobelt-Based Gas Sensor for H2, NO2, and Hydrocarbon Sensing
A conductometric H2, NO2, and hydrocarbon gas sensor based on single-crystalline zinc oxide (ZnO) nanobelts has been developed. The nanobelt sensitive layer was deposited using a radio frequency (RF) magnetron sputterer. The microcharacterization study reveals that the nanobelts have a single crystal hexagonal structure with average thickness and width of about 10 and 50 nm, respectively. The s...
متن کاملA Layered SAW Device Based on ZnO/LiTaO3 for Liquid Media Sensing Applications
Surface Acoustic Wave (SAW) sensors comprising a zinc oxide guiding layer deposited on a 36°-YX lithium tantalate substrate were developed. They were found to have greater mass sensitivity than other LiTaO3 based SAW sensors, such as the SiO2/LiTaO3 configuration. In this paper, the fabrication of the ZnO/LiTaO3 sensor is described and micro-characterisation of the deposited films is presented....
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2009